Transmission Electron Microscopes and Peripherals

JEM 3200FSK
(Excitation energy selective cathodoluminescence microscope)
- High resolution TEM imaging
- EELS
- Cathodoluminescence spectroscopy
- Hambury Brown-Twiss cathodoluminescence
- Inelastically scattered electron-photon correlation
- Photon mapping
- Lattice irradiation

FEI(ThermoFisher) Titan cubed G2
- Rapid STEM imaging
Electron Energy Loss Spectroscopy
Electron tomography - High resolution STEM imaging
- EDS
- Strain mapping (Nano beam diffraction)
- Precession electron diffraction
IGSES shared facility

JEOL ARM 200F
- High resolution STEM imaging
- EDS
- Strain mapping (Nano beam diffraction)
- Precession electron diffraction
IGSES shared facility
Specialized Peripheral Equipment

Specimen Holders
- High angle triple axis holder
- High tilt cryo holder (liquid nitrogen)
- Double tilt cryo holder (liquid nitrogen)
Above: IGSES shared facility
- Strain & tomography holder
- Double tilt MEMS chip heating holder
Above: IGSES Hata Laboratory‘s facility
※Many of these specialized holders were developed in collaboration with Mel-Build Co.(Fukuoka, Japan)

Anaerobic Glove Box
Reactive specimens can be handled/treated under inert gasses atmosphere using this glove box setup. Then, they will be loaded in a dedicated specimen holder to be transferred into a specific microscope without exposing to the atmosphere.
IGSES Hata Laboratory‘s facility
Optical Microscope

Optical Microscope
- Photoluminescence measurement
- Time-resolved measurement with ns pulsed excitation laser (under implementation)
Focused Ion Beam - Scanning Electron Microscopes(FIB-SEM)

FEI(ThermoFisher) Scios
- Ga ion beam
- Micrometer-sampling
- EBSD
- Cryo stage
IGSES shared facility

FEI(ThermoFisher) Helios 5 Hydra
- Plasma ion beam sources (Xe, Ar, O, N)
- Sub-millimeter-sampling
- EDS
- EBSD
- TOF-SIMS
- Vacuum transfer from the glove box
IGSES shared facility
Sample Fabrication equipment

Gatan PIPS II Ar ion milling system
IGSES shared facility

Spin Coater

Centrifuge

RF-Sputtering Deposition System

Electric Furnace

Drying Oven

Thermal Deposition System
Software
ex.) Deep learning-based noise filter created by DragonflyDragonfly

Software
- 3D reconstruction(Temography, Inspect 3D)
- FDTD(CrystalWave)
- Machine Learning & Other Image Processing(Dragonfly)
- Gatan DigitalMicrograph
- Custom-developed software based on Python, DM-Script, MATLAB, and Mathematica